The DPS gives every year the Best Paper Award and the Young Researcher Award to recognize excellence among the contributing papers. Based on scientific relevance the Young Researcher Award will be presented to the first author of a paper (oral or poster presentation) if his/her age is less than 33 on January 1, 2008.
Announcement of Best Paper Award and
Young Researcher Award Winners (DPS 2007)
The Best Paper Award is awarded to authors for outstanding paper presented in DSP 2007. The winner of this award is G. Delgadino, D. Keil, J. Booth, and C. Lee from Lam Research Corporation. Dr. Delgadino presented a paper entitled "Plasma Diagnostic Probe for Etch Chamber Monitoring and Control."
The winners of Young Researcher Award are T. Ohchi from Sony Corporation and T. Yorimoto from Hiroshima University. Dr. Ohchi presented a paper entitled "Reducing Damage to Si Substrates during Gate Etching Processes." Dr. Yorimoto presented a paper entitled "Formation of Low-Defect-Concentration Polycrystalline Si Films by Thermal Plasma Jet Crystallization Technique."
We would like to congratulate the winners. We will hold on award ceremony in DPS 2008, and also introduce the award winner in the proceedings.