Dry processes are the state of the art technologies leading the way through ultra-high performance in microelectronic devices. The DPS provides for 29 years a valuable forum of discussions on science and technology of new developments in this field. Present 30th symposium is to be held in Tokyo, Japan. A special issue of "Japanese Journal of Applied Physics" will be published besides the Extended Abstracts.
The DPS Organizing Committee invites you to the conference and welcomes the submission of your papers.
 |
 |
|---|---|
 |
 |
|
|
 |
|