Dry processes and related technologies from fundamentals to applications
- Mechanisms of plasma-induced surface reactions
- Diagnostics and monitoring of plasmas and Reacion surfaces
- Damages induced by photon-, electron-, and ion-irradiation onto surface
- Surface reactions of wet process (cleaning, CMP, electroplating)
- Process technologies for etching, CVD and surface treatment
- Dry process for low-k, high-k, and new materials
- MEMS technologies
- Process technologies for flat panel display (LCD, PDP, Organic ELD)
- Nanotechnologies and bio-applications
- Environmental technologies
- Equipment technology for dry processes
- New dry process concept (micro-plasmas, atmospheric plasmas, etc)
"Fluctuation, DFM, FDC, and uniformity of dry process"